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A microactuator is a microscopic servomechanism that supplies and transmits a measured amount of energy for the operation of another mechanism or system. As a general actuator, following standards have to be met:

Contents

• Principle of microactuators
• Classes of microactuators
• See also

• Large travel
• High precision
• Fast switching
• Low power consumption
• Power free force sustainability

For microactuator, there are two in addition

• Microstructurability
• Integrability

Principle of microactuators

The basic principle can be described as the expression for mechanical work
${\displaystyle W={\overrightarrow {F}}\cdot \Delta {\overrightarrow {r}}}$
since an actuator is to manipulate positions and therefore force is needed. For different kind of microactuators, different physical principles are applied.

Classes of microactuators

• Electrostatic
• Electromagnetic
• Piezoelectric
• Fluid
• Thermal

See also

• Newton's laws
• Euler–Bernoulli beam equation
• Electrostatics
• Electromagnetism
• Piezoelectricity
• Microfluidics
• Sensors
• Nanotube nanomotor